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1

Computation of reflected images from EUV masks

Srinivas B. Bollepalli, Franco Cerrina

Journal:

Microelectronic Engineering

Year:

1999

Language:

english

File:

PDF, 675 KB

english, 1999

2

Is computed tomography a reliable diagnostic modality in detecting placental injuries in the setting of acute trauma?

Maria Manriquez, Gujjarappa Srinivas, Srigayatri Bollepalli, Lynley Britt, David Drachman

Journal:

American Journal of Obstetrics and Gynecology

Year:

2010

Language:

english

File:

PDF, 1.51 MB

english, 2010

3

Investigation of mask pattern proximity correction to reduce image shortening in X-ray lithography

Scott Hector, Victor Pol, Mumit Khan, Srinivas Bollepalli, Franco Cerrina

Journal:

Microelectronic Engineering

Year:

1998

Language:

english

File:

PDF, 348 KB

english, 1998

4

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 24 February 2008)] Optical Microlithography XXI - Integration of pixelated phase masks for full-chip random logic layers

Schenker, Richard, Bollepalli, Srinivas, Hu, Bin, Toh, Kenny, Singh, Vivek, Yung, Karmen, Cheng, Wen-hao, Borodovsky, Yan, Levinson, Harry J., Dusa, Mircea V.

Year:

2008

Language:

english

File:

PDF, 1012 KB

english, 2008

5

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 24 February 2008)] Optical Microlithography XXI - Making a trillion pixels dance

Singh, Vivek, Hu, Bin, Toh, Kenny, Bollepalli, Srinivas, Wagner, Stephan, Borodovsky, Yan, Levinson, Harry J., Dusa, Mircea V.

Year:

2008

Language:

english

File:

PDF, 931 KB

english, 2008

6

SPIE Proceedings [SPIE 23rd Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 22 February 1998)] Emerging Lithographic Technologies II - Modeling study of image formation with point sources

Bollepalli, Srinivas B., Khan, Mumit, Cerrina, Franco, Vladimirsky, Yuli

Year:

1998

Language:

english

File:

PDF, 1.62 MB

english, 1998

7

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Computation of reflected images from extreme ultraviolet masks

Bollepalli, Srinivas B., Cerrina, Franco, Vladimirsky, Yuli

Year:

1999

Language:

english

File:

PDF, 1.97 MB

english, 1999

8

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - X-ray mask fabrication at CXrL

Leonard, Quinn J., Bansel, Jaz, Yang, Lei, Vladimirsky, Olga, Bollepalli, Srinivas B., Khan, Mumit, Vladimirsky, Yuli, Cerrina, Franco, Taylor, James W., Simon, Klaus, Rathbun, Lynn C., Tiberio, Richa

Year:

1999

Language:

english

File:

PDF, 2.91 MB

english, 1999

9

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Optical Microlithography XXI - Generalized inverse problem for partially coherent projection lithography

Davids, Paul S., Bollepalli, Srinivas B.

Year:

2008

Language:

english

File:

PDF, 647 KB

english, 2008

10

SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Emerging Lithographic Technologies - Simulation of x-ray mask defect printability

Bollepalli, Srinivas B., Hector, Scott D., Maldonado, Juan R., Leavey, Jeffrey A., Cerrina, Franco, Khan, Mumit, Seeger, David E.

Year:

1997

Language:

english

File:

PDF, 850 KB

english, 1997

11

SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Optical Microlithography X - Topography description model for 3D exposure simulation

Khan, Mumit, Bollepalli, Srinivas B., Cerrina, Franco, Fuller, Gene E.

Year:

1997

File:

PDF, 699 KB

1997

12

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Sub-100-nm imaging in x-ray lithography

Vladimirsky, Olga, Dandekar, Niru V., Jiang, Wenlong, Leonard, Quinn J., Simon, Klaus, Bollepalli, Srinivas B., Vladimirsky, Yuli, Taylor, James W., Vladimirsky, Yuli

Year:

1999

Language:

english

File:

PDF, 3.31 MB

english, 1999

13

SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Emerging Lithographic Technologies - Evaluation of aerial image in XRL

Yi, Moonsuk, Kim, Ohyun, Bollepalli, Srinivas B., Khan, Mumit, Cerrina, Franco, Seeger, David E.

Year:

1997

Language:

english

File:

PDF, 353 KB

english, 1997